The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2003
Filed:
May. 27, 1999
Michael D. Welch, Livermore, CA (US);
Harald Herchen, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A chamber comprises a support for holding a substrate and a sensor system adapted to detect the presence or proper placement of the substrate on the support . The support comprises a window that is transparent and adapted to transmit light therethrough. The sensor system comprises a light source adapted to direct a light beam through the window and a light sensor in the path of the light beam . The light beam is sensed by the light sensor when the substrate is properly positioned and the light beam is blocked from the light sensor when the substrate is improperly positioned or vice versa. Preferably, the support comprises an electrostatic chuck adapted to electrostatically hold the substrate , the electrostatic chuck comprising a window composed of transparent material or a cut-out or a hole therein.