The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2003
Filed:
Sep. 26, 2001
Applicant:
Inventors:
Assignee:
Leybold Vakuum GmbH, Cologne, DE;
Primary Examiner:
Int. Cl.
CPC ...
F16K 1/120 ;
U.S. Cl.
CPC ...
F16K 1/120 ;
Abstract
During the pumping of corrosive gases, it is advantageous to admit a seal gas to endangered pumping chambers at a lower flow rate and a higher pressure than the corrosive gases. Inert gas from a supply ( ) has its pressure reduced by a pressure reducer ( ). An on/off valve ( ) controls a flow of the inert gas through a flow restriction ( ) which restricts the flow of inert gas to appropriate sealing gas rates at an outlet ( ). After pumping the corrosive gas, a control valve ( ) in a bypass line ( ) causes the inert gas to be supplied to the outlet ( ) at a higher flow rate for purging the pump.