The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2003
Filed:
Apr. 30, 2001
Applicant:
Inventor:
Albert M. Leung, Burnaby, CA;
Assignee:
Simon Fraser University, Burnaby, CA;
Primary Examiner:
Int. Cl.
CPC ...
G01P 1/500 ; B81C 1/00 ;
U.S. Cl.
CPC ...
G01P 1/500 ; B81C 1/00 ;
Abstract
A process for fabricating an accelerometer, which includes providing a substrate with a layer of electrically conductive material on the substrate, micromachining the substrate to form a central electrical heater, a pair of temperature sensitive elements, and a cavity beneath the heater and the temperature sensing elements. Each temperature sensing element is spaced apart from said heater a distance in the range of 75 to 400 microns. The temperature sensing elements are located on opposite sides of the heater, thereby forming an accelerometer.