The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2003
Filed:
Jun. 04, 2002
Applicant:
Inventors:
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 ;
U.S. Cl.
CPC ...
H05H 1/24 ;
Abstract
A method for depositing a functionally gradient thin film of the present invention includes the steps of: introducing two or more types of material gases into a process chamber which includes a cylindrical rotary electrode provided so as to be opposed to a substrate on which a thin film is deposited, the cylindrical rotary electrode being rotated by applying a high-frequency power thereto; and sliding the substrate into the process chamber while maintaining the rotation of the cylindrical rotary electrode so as to create plasma between the cylindrical rotary electrode arid the substrate for depositing the thin film.