The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2003
Filed:
Oct. 31, 2001
Applicant:
Inventors:
Tetsuo Tsuchiya, Ibaraki, JP;
Susumu Mizuta, Ibaraki, JP;
Toshiya Kumagai, Ibaraki, JP;
Tsutomu Yoshitake, Tokyo, JP;
Yuichi Shimakawa, Tokyo, JP;
Yoshimi Kubo, Tokyo, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/100 ; B44C 1/22 ; C23F 1/00 ;
U.S. Cl.
CPC ...
H01L 2/100 ; B44C 1/22 ; C23F 1/00 ;
Abstract
An oxide for use in a bolometer with an oxide thin-film formed is manufactured on an insulating substrate. Metal organic compound is dissolved in solvent to form solution during manufacturing the oxide thin-film. The solution is applied on the insulating substrate, and the applied solution is dried. A bond between carbon and oxygen is cut and decomposed by irradiating a laser ray with wavelength of 400 nm or less. A generated oxide is crystallized.