Cerium based abrasive material

Abstract

There is provided a cerium-based abrasive which enables formation of a highly accurate polished surface and has improved grindability. There is also provided a method of evaluating cerium-based abrasives in a relatively easy manner. In order to achieve the above objects, the cerium-based abrasive of this invention is a cerium-based abrasive containing 40% by weight or more of cerium oxide (on the basis of the total weight of rare earth oxides) which is characterized by further containing 0.5 to 10% by weight of fluorine per 100% by weight of the cerium-based abrasive, in terms of atomic weight, and polishing particles consisting of crystals with a lattice constant measured by an X-ray powder diffraction method ranging from 0.544 to 0.560 nm. And the method of evaluating cerium-based abrasives of this invention is a method including the steps of: analyzing samples of cerium-based abrasive to be subjected to evaluation by the X-ray powder diffraction method; obtaining a diffraction angle (&thgr;) of at least one of maximum peaks appearing over the prescribed four ranges; and calculating a lattice constant of crystals constituting the polishing particles of the cerium-based abrasive using the above diffraction angle (&thgr;).