The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2003
Filed:
Jun. 19, 2002
OMRON Corporation, Kyoto, JP;
Abstract
A pressure-detecting chamber , a pressure-directing path and a buffer space are formed on the upper face of a main-body-side substrate as recessed portions, and the upper face of the pressure-detecting chamber is covered with a thin-type diaphragm , and upper faces of the pressure-directing path and the buffer space are covered with a cover substrate . A pressure-introducing unit formed on the lower face of the main-body-side substrate is connected to the lower face of the buffer space . The cross-section of the buffer space is greater than the cross-section of the pressure-introducing unit , and the capacity of the buffer space is greater than the capacity of the pressure-directing path . With this arrangement, it is possible to provide a pressure sensor which can control the response characteristic of the pressure sensor to a pressure change with high precision without causing serious adverse effects on the other characteristics of the pressure sensor, without preventing the miniaturization of the sensor.