The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2003
Filed:
Jun. 30, 2000
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Abstract
A Y stage is capable of translational driving in the Y-axial direction, by independently controllable Y linear motor and Y linear motor. The amount of movement of the Y stage is detected by a Y linear encoder and Y linear encoder, and fed back to a Y control system and &thgr; control system. The Y control system outputs a translational thrust command value, by receiving the average value of each positional detecting value measured by the Y linear encoder and Y linear encoder as the stage translational direction position feedback value. The &thgr; control system receives the difference between each position detecting value as a stage yawing direction position feedback value, and outputs a yawing direction thrust command value. A non-interference block outputs Y linear motor thrust command value and Y linear motor thrust command value, by the use of the translational thrust command value and the thrust command value. Thus, the movement of the Y stage can be divided into translational direction movement and yawing direction movement, and independently controlled and compensated.