The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2003
Filed:
Dec. 21, 2000
William E. Nelson, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A new non-contacting, edge-coupled micromechanical device and method, requiring no contact between the mirror or underlying yoke and landing pads on the substrate. Elimination of physical contact eliminates the problem of “sticking” mirrors found in conventional devices, and simplifies the manufacturing process by reducing the requirements for passivation coatings and hermetic packages. A capture electrode is provided at an appropriate elevation above the surface of the device so as to be in close proximity with the edge of the mirror or yoke when it rotates to the desired angle. The capture electrode and mirror assembly are biased to establish a very high electrostatic attraction between the two which stops the mirror. The mirror can be critically damped to prevent oscillations of the mirrors by tailoring at least one of the voltages applied to the mirror and capture electrode.