The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2003
Filed:
Aug. 31, 2000
Applicant:
Inventors:
Walter J. Edmonds, Allen, TX (US);
Timothy B. Vaughn, Lubbock, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 2/700 ;
U.S. Cl.
CPC ...
H01J 2/700 ;
Abstract
A liner ( ) for an arc chamber ( ) of an ion implanter. The arc chamber ( ) comprises a liner ( ) on the inner surface ( ) of the arc chamber ( ) that extends the life of the arc chamber ( ). The liner ( ) comprises a one piece portion ( ) that covers the bottom and long sidewalls of the arc chamber ( ) and two end plates ( ) for covering the end walls of the arc chamber ( ). When the liner ( ) wears out it is replaced at a significantly reduced cost compared to replacing the entire arc chamber ( ).