The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 24, 2003

Filed:

Oct. 11, 2001
Applicant:
Inventor:

Philip C. Harvey, Hampton Falls, NH (US);

Assignee:

Diamond Semiconductor Group, LLC, Gloucester, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 1/08 ;
U.S. Cl.
CPC ...
G01K 1/08 ;
Abstract

A fast dosimeter for ion implantation and other systems that produce charges or current to be measured. When a charge accumulator reaches a predetermined charge, a fixed charge is removed to reduce the accumulated charge. A counter records each charge removal. Between removals, an analog-to-digital converter measures the accumulator charge. The outputs from the counter and the analog-to-digital converter provide a continually updated value for the total accumulated charge, and by differentiation, current with respect to time.


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