The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2003
Filed:
Jun. 26, 2001
Applicant:
Inventors:
Sandeep Bahl, Palo Alto, CA (US);
Karen L. Seaward, Palo Alto, CA (US);
Assignee:
Agilent Technologies, Inc., Palo Alto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/14763 ; H01L 2/1336 ; H01L 2/974 ;
U.S. Cl.
CPC ...
H01L 2/14763 ; H01L 2/1336 ; H01L 2/974 ;
Abstract
A buried channel and a method of fabricating a buried channel in a substrate including depositing a layer of masking material onto a surface of a substrate, etching a groove in the masking layer, etching a channel into the substrate through the groove, and depositing a cover layer over the masking layer and groove such that the covering layer at least substantially closes over the groove.