The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2003
Filed:
Aug. 29, 2002
Applicant:
Inventors:
John Rodriguez, Richardson, TX (US);
Anand Krishnan, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 3/126 ;
U.S. Cl.
CPC ...
G01R 3/126 ;
Abstract
Methods are disclosed for determining charging related to one or more semiconductor processing steps. A wafer having a substantially unpolarized ferroelectric capacitor formed therein is exposed to a processing operation. After processing, the ferroelectric capacitor is measured to determine the extent to which the processing operation polarized the ferroelectric capacitor, and a process related charging value is determined according to the ferroelectric capacitor polarization.