The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2003
Filed:
Mar. 23, 2000
Applicant:
Inventors:
Mayumi Arai, Tokyo, JP;
Yoshiyuki Yamazaki, Tokyo, JP;
Assignee:
MKS Japan, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/12 ; B08B 9/032 ; H05B 1/00 ;
U.S. Cl.
CPC ...
B08B 3/12 ; B08B 9/032 ; H05B 1/00 ;
Abstract
The liquid supply system comprises a pump for delivering a liquid under high pressure and a vaporizer for vaporizing the liquid delivered from the pump. The liquid vaporized in the vaporizer is supplied to a reaction chamber. A pressure gage is provided in a passage extending from the pump to the vaporizer. A monitor device is provided so as to indicate a pressure, based on an output of the pressure gage.