The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 17, 2003

Filed:

Dec. 04, 2000
Applicant:
Inventor:

Bernd Nawracala, Karlsruhe, DE;

Assignee:

Agilent Technologies Inc., Palo Alto, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 ;
U.S. Cl.
CPC ...
G01B 9/02 ;
Abstract

A procedure is described to calibrate an optical converter, especially for use in the field of reflectrometric interference spectroscopy. The converter has a layer/substrate system with a layer and a substrate. A light beam shines from the substrate side, and parts of it are reflected or transmitted at the interfaces of air/substrate, substrate/layer and layer/air. The converter in particular serves to convert the light beam into a modulated (especially frequency modulated or phase modulated) signal. The light is varied within a wavelength or frequency range from which a corresponding modulated spectrum is determined. In particular, it is assumed that the performance quantities of especially the converter and a radiation source generating the light are subject to temporal fluctuations. The calibration is carried out in particular by determining reference values of the modulated spectrum at time t=0, successively determining values of the modulated spectrum for times t>0, and calculating temporal changes in the modulated spectrum for t>0 using in particular a linear disturbance equation based on the assumed infinitisimal changes in at least one of the performance quantities so the interference spectroscopy measuring setup.


Find Patent Forward Citations

Nawracala, Bernd. (2003). Self-calibrating measuring setup for interference spectroscopy (U.S. Patent No. 6580510). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6580510

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