The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2003
Filed:
Aug. 14, 2000
Shin-Etsu Chemical Co., Ltd., Tokyo, DE;
Abstract
There is disclosed a piezoelectric single crystal wafer wherein an etching pit density on the front surface of the wafer on which an electrode for transmit-receive of surface acoustic wave or leaky surface acoustic wave is formed is 7.8×10 /mm or less, and a piezoelectric single crystal wafer wherein surface roughness Ra on the peripheral surface other than the front surface and the reverse surface of the wafer is 2.3 &mgr;m or less. There can be provided a piezoelectric single crystal wafer wherein a deviation of surface acoustic wave velocity or leaky surface acoustic wave velocity is small, namely the uniformity of the velocity is excellent, and fine contaminations adhered on the surface where electrode is formed and breakage of the wafer can be significantly reduced, and therefore a device such as a filter having excellent property can be produced in high yield.