The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 17, 2003

Filed:

Oct. 10, 2001
Applicant:
Inventors:

Tetsuro Asano, Oizumi-Machi, JP;

Toshikazu Hirai, Oizumi-Machi, JP;

Takayoshi Higashino, Neyagawa, JP;

Koichi Hirata, Ashikaga, JP;

Mikito Sakakibara, Menuma-Machi, JP;

Assignee:

Sanyo Electric Co., Ltd., Moriguchi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/980 ; H01L 3/1112 ;
U.S. Cl.
CPC ...
H01L 2/980 ; H01L 3/1112 ;
Abstract

The conventional compound semiconductor switching device is prone to have a large chip size as the gate width needs to be large for achieving a low insertion loss and the separation between the connecting pad and the circuit wiring needs to be larger than 20 &mgr;m for obtaining a proper isolation between them. The overall chip size is reduced, first, by reducing the gate width of the switching FET operating at frequencies above 2.4 GHz to 700 &mgr;m or smaller together with the omission of the shunt FET, and, then, by reducing the separation between the connecting pad and the circuit wiring to 20 &mgr;m or smaller. This reduction of the separation is made possible by the introduction of an insulating film and a impurity region between the outermost portion of the connecting pad and the substrate for preventing the extension of the depletion layer. The manufacturing method of this device does not need any additional processing step for accommodating the above structure, and is capable of producing a device having a size of one fifth of the conventional device.


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