Elimination of n+ contact implant from flash technologies by replacement with standard double-diffused and n+ implants

Abstract

A method of manufacturing a semiconductor device that eliminates the n+ contact implant by using double diffused implants under the core cell contacts by forming core, n-channel and p-channel transistors in a semiconductor substrate, simultaneously forming source and drain DDI implants for the core transistors, forming source and drain Mdd implants for the core transistors, forming source and drain Pldd implants for the p-channel transistors, forming source and drain Nldd implants for the n-channel transistors, forming sidewall spacers on the core, n-channel and p-channel transistors, forming N+ implants for the n-channel transistors, forming P+ implants for the p-channel transistors and forming P+ contact implants for the p-channel transistors.