The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2003
Filed:
Nov. 09, 2000
Raffaele Zambrano, Viagrande, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A process for selectively sealing ferroelectric capacitive elements in non-volatile memory cells being integrated in a semiconductor substrate and comprising at least one MOS transistor, which process comprises at least the following steps: forming said at least one MOS transistor on the semiconductor substrate, and depositing an insulating layer over the whole surface of the semiconductor; and further comprises the steps of: depositing a first metal layer to form, using a photolithographic technique, a lower electrode of at least one ferroelectric capacitive element; depositing a layer of a dielectric material onto said first layer; depositing a second metal layer to form, using a photolithographic technique, an upper electrode of at least one ferroelectric capacitive element; depositing a layer of a sealing material onto said second metal layer; defining the dielectric material layer and sealing layer by a single photolithographic defining step, so as to pattern said dielectric layer and concurrently seal said at least one capacitive element.