The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2003
Filed:
Nov. 13, 2001
Enrico Chiesa, Besozzo, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A sensing device having a microelectromechanical structure made of semiconductor material, and a control loop for controlling the microelectromechanical structure, the microelectromechanical structure including a stator element and a rotor element electrostatically coupled together, and the control loop including a position interface supplying a position signal indicative of the position of the rotor element, and a one-bit quantizer receiving the position signal and supplying a corresponding bit sequence. The sensing device further includes a calibration device for calibrating the microelectromechanical structure, including a microactuator made of semiconductor material and coupled to the rotor element, and a driving circuit for driving the microactuator, and receiving the bit sequence and supplying to the microactuator a driving signal correlated to a mean value of the bit sequence in a given time window.