The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2003
Filed:
Dec. 17, 1999
Hisashi Nara, Hiratsuka, JP;
Toshihiro Nishisaka, Hiratsuka, JP;
Other;
Abstract
An excimer laser device capable of suppressing vibration of a cross flow fan, and preventing breakage of magnetic bearings when the vibration increases is provided. For this purpose, the device has a configuration that in the excimer laser device including magnetic bearings ( ) each having an inner ring section ( ) and an outer ring section ( ), and a cross flow fan ( ) for circulating a laser gas in a chamber ( ), touch-down bearings ( ) are provided on the outer peripheral side of a rotating shaft ( ), and the inner peripheral face of an inner peripheral portion ( B) of the touch-down bearing ( ) and the outer peripheral face of the rotating shaft ( ) are disposed opposite each other with a predetermined clearance smaller than a gap ( ) between the outer peripheral face of the inner ring section ( ) and the inner peripheral face of the outer ring section ( ).