The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2003
Filed:
Oct. 20, 2000
Chia-Yu Ai, Tucson, AZ (US);
Takeshi Asami, Palo Alto, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A wavefront sensor is provided to determine characteristics of an incoming distorted energy beam. The sensor includes a plurality of multi-lens array and a beam detector, such as a CCD camera. The multi-lens array focuses the energy beam to a multiple focal spots forming a diffraction pattern on the CCD camera. The invention teaches a method to eliminate or substantially reduce a cross talk or interference in measuring the intensity of the focal spots. The beam detector or CCD detects the resulted focal spots and determines the characteristics of the incoming energy beam. The method and wavefront sensor according to this invention can be used in combination with an exposure apparatus in a semiconductor wafer manufacturing process.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile