The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2003
Filed:
Dec. 17, 1999
Applicant:
Inventor:
Sipke Wadman, Eindhoven, NL;
Assignee:
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 2/147 ; G01B 1/130 ;
U.S. Cl.
CPC ...
G01N 2/147 ; G01B 1/130 ;
Abstract
A scatterometer for the investigation of surface quality causes a radiation beam ( ) with a well-defined direction to fall upon a sample under test ( ). The radiation scattered by the sample is intercepted by a screen ( ). The two-dimensional image on the screen is captured by a detection system ( ). The electric output signal (S) of the detection system is processed for providing a figure of merit of the sample.