The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2003
Filed:
Jun. 30, 2000
Shun-ichiro Tanaka, Yokohama, JP;
Yutaka Wakayama, Nagoya, JP;
Other;
Abstract
A fine particle of metal is disposed on a semiconductor substrate. With the exception of a position of disposition of the fine particle of metal, a covering layer is formed on a surface of the semiconductor substrate. Thereafter, heat treatment is implemented at a temperature higher than that where constituent atoms of the semiconductor substrate and constituent atoms of the fine particle of metal dissolve at an interface thereof due to interdiffusion in a vacuum atmosphere. Thus, a fine projection structure that comprises a semiconductor substrate and a fine projection consisting of a solid solution of the semiconductor substrate and the metal is obtained. The fine projection is formed with part thereof precipitating in the semiconductor substrate. The fine projection structure as this largely contributes in realizing high integration semiconductor devices and quantum size devices.