The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2003
Filed:
Feb. 22, 2001
Chuen-Der Lien, Los Altos Hills, CA (US);
S. K. Lee, Fremont, CA (US);
Integrated Device Technology, Inc., Santa Clara, CA (US);
Abstract
A first insulating layer ( ) overlying semiconductor substrate ( ) has a plurality of conductive paths ( ) disposed thereon. Each of the plurality of conductive paths has at least a major portion thereof overlied with a second insulating layer ( ). A third insulating layer ( ), having air gap ports ( ) formed therein, overlies adjacent conductive paths and extends from one to another such that an air gap ( ) is formed. A passivation layer ( ) overlies third insulating layer and seals the plurality of air gaps ports to form an insulation structure ( ) for a semiconductor integrated circuit, and method thereof.