The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2003
Filed:
Apr. 05, 2001
Naoto Hashikawa, Tokyo, JP;
Koji Fukumoto, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
An object is to provide a sample holder and a sample mount which allow observation of a sample from many directions in an electron microscope. A sample holder ( ) is made for use in a transmission electron microscope (TEM). In the TEM, an electron beam is incident in the Z direction. A sample mount ( ) and a sample (SA) affixed on it can be rotated by a motor ( ) in the range of 0 to 360° on an axis extending in the Y direction which differs from the direction of the electron beam incidence. Therefore the electron beam can enter the observed sample (SA) from many directions, thus allowing observation of the sample (SA) from many directions. It is also possible to FIB-process the sample (SA) in many directions without removing the sample (SA) from the sample holder ( ), which facilitates the handling in the FIB processing.