The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2003
Filed:
Oct. 26, 2001
Applicant:
Inventors:
Stephen W. Downey, Orlando, FL (US);
Edward B. Harris, Orlando, FL (US);
Paul B. Murphey, Winter Garden, FL (US);
Assignee:
Agere Systems Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/14763 ;
Abstract
The present invention provides a method of manufacturing a semiconductor device. In one embodiment, the method includes forming a positive relief structure from a material located on a substrate, the step of forming the positive relief structure leaving an unwanted remnant of said material proximate a base of the positive relief structure. The method further includes cleaning the positive relief structure. In addition, the method includes removing the unwanted remnant with a gas containing fluorine and that is substantially free of hydrogen.