The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2003
Filed:
Dec. 07, 2000
Applicant:
Inventors:
Sungho Jin, Millington, NJ (US);
Hyongsok Soh, Basking Ridge, NJ (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 2/608 ;
U.S. Cl.
CPC ...
G02B 2/608 ;
Abstract
In accordance with the invention, the component layer, the spacer and the actuator layer of a MEMs device are assembled at ambient temperature and held together in lateral alignment by upper and lower magnets. Such ambient temperature magnetic packaging greatly minimizes the undesirable exposure of the sensitive MEMs components to high temperatures. The resulting MEMs device exhibits the high dimensional accuracy and stability. In a preferred embodiment, the component layer comprises a layer of movable mirrors and a spacer aerodynamically and electrostatically isolates each mirror, minimizing cross-talk between adjacent mirrors.