The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2003
Filed:
Feb. 27, 2002
Applicant:
Inventors:
Assignee:
Sony Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 5/10 ; G21K 5/10 ; G21K 7/00 ; G21G 5/00 ; G01N 2/300 ;
U.S. Cl.
CPC ...
G01K 5/10 ; G21K 5/10 ; G21K 7/00 ; G21G 5/00 ; G01N 2/300 ;
Abstract
A focusing stage is provided on a slide table of a support mechanism portion on which a master is supported, at a position adjacent to the master. At the time of recording, first, the focusing stage is irradiated with an electron beam to thereby focus the electron beam, and thereafter recording is conducted by irradiating the master with the electron beam.