The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2003
Filed:
Oct. 13, 2000
Applicant:
Inventors:
Sankar Sambasivan, Chicago, IL (US);
Scott A. Barnett, Evanston, IL (US);
Ilwon Kim, Skokie, IL (US);
John Rechner, Wilmette, IL (US);
Assignee:
Applied Thin Films, Inc., Evanston, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 3/558 ;
U.S. Cl.
CPC ...
C04B 3/558 ;
Abstract
The present invention relates to oxides on suitable substrates, as converted from nitride precursors. A composition comprising a solid solution of zirconium nitride and yttrium nitride (YZN) represented by the formula (Zr Y )N where x is a value from 0.1 to 0.9 is also disclosed.