The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2003
Filed:
Sep. 28, 2001
Applicant:
Inventors:
Sailesh Mansinh Merchant, Orlando, FL (US);
Minseok Oh, Orlando, FL (US);
Deepak A. Ramappa, Orlando, FL (US);
Assignee:
Agere Systems Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1449 ; B05C 3/05 ;
U.S. Cl.
CPC ...
H01L 2/1449 ; B05C 3/05 ;
Abstract
A method and apparatus for the electroplating deposition of a metal onto a semiconductor wafer surface ( ), including vibrationally scrubbing the wafer surface ( ) during an electroplating process. At least one transducer ( ) is mounted to a wall ( ) of an electroplating tool chamber ( ). The transducer ( ) intermittently delivers sonic energy pulses lasting for one to two seconds to the electroplating solution during the electroplating process.