The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2003
Filed:
Jun. 19, 2000
Tue Nguyen, Fremont, CA (US);
Craig Alan Bercaw, Los Gatos, CA (US);
Simplus Systems Corporation, Fremont, CA (US);
Abstract
An integrated precursor delivery system which integrates a precursor delivery system with a processing chamber is provided for improving the precursor delivery lines to the processing chamber, and for keeping the delivery lines intact during servicing the processing chamber. The apparatus provides an integrated precursor delivery system mounted on the processing chamber lid with the chamber lid being removable for allowing manual access to the inside of the processing chamber. With the precursor delivery system is in the close vicinity of the processing chamber, the delivery lines are shortest possible, minimizing the chance of precursor contamination. With the delivery system and the chamber lid in one unit, the removal of the chamber lid will no longer require breaking the delivery lines, leading to better contamination control. The present invention is particular suitable for liquid precursors since liquid is much more difficult to evacuate than gas. The invention further provides a hybrid system of integrated precursor delivery system and remote precursor delivery system. For gaseous precursors, especially non-reactive precursor such as nitrogen, argon, helium, the cleaning of the delivery line is very simple. Therefore a hybrid system of integrated and remote precursor delivery systems offers the best solution, an integrated precursor delivery system for the difficult-to-clean precursors, and a remote precursor delivery system for the easy-to-clean precursors.