The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2003
Filed:
Apr. 13, 2000
Applicant:
Inventor:
Hiroshi Abiko, Yamagata, JP;
Assignee:
Tohoku Pioneer Corporation, Yamagata, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/400 ; C23C 1/424 ; C23C 1/430 ;
U.S. Cl.
CPC ...
C23C 1/400 ; C23C 1/424 ; C23C 1/430 ;
Abstract
An apparatus and a process for producing an organic electroluminescent display without deteriorating its luminous efficiency are provided. The apparatus according to the present invention, in which a metal electrode is formed by electron beam evaporation method, contains a device for preventing secondary electrons generated at an evaporation source from reaching a display board. Thus, a layer of organic electroluminescent material formed on the display board is not damaged by the secondary electrons, thereby a luminous efficiency of the layer of organic electroluminescent material can be kept high without being deteriorated.