The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2003
Filed:
Nov. 29, 2000
Shogo Kosuge, Tachikawa, JP;
Hitachi Kokusai Electric Inc., Tokyo, JP;
Abstract
In a size inspection method and a size inspection apparatus, even when a measurement object has a contour having sizes not to be easily measured and having a contour not to be easily determined, the contour and the sizes can be determined. A contour of the inspection or measurement object is detected, and positions detected are registered to constitute a group of registered positions. At measurement or inspection, a comparison is conducted with the group of registered positions in a measurement direction to extract correlation data within a measurement range. A position having highest correlation with the group of registered positions is set as a position on one side of a size measurement location. Resultantly, sizes are measured and a contour is inspected.