The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2003
Filed:
Jun. 04, 2002
Osamu Suenaga, Nirasaki, JP;
Makoto Yamamoto, Nirasaki, JP;
Naoki Mori, Tokyo, JP;
Hiromu Ito, Tokyo, JP;
Sadao Kobayashi, Tokyo, JP;
Other;
Abstract
A heat exchange section ( ) is provided in the middle of a circulation water path ( ) connecting between a temperature-controlled water tank ( ) and a semiconductor manufacturing apparatus body ( ) so as to perform a heat exchange with air of a clean room ( ). The heat exchange section ( ) is installed near an exit of an air circulation path ( ) above a fan-filter unit ( ) of the clean room as a temperature stabilized area off an atmosphere of the clean room ( ). Additionally, as another method, a temperature of a chemical fluid from a chemical fluid tank ( ) is controlled to be a temperature of the air in the clean room by a heat exchange section ( ) provided in a location the same as above without using the temperature-controlled water so as to supply the chemical fluid to the semiconductor manufacturing apparatus body ( ).