The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2003
Filed:
Jun. 14, 2002
Wolfgang Scholz, Minden, DE;
Albrecht Vogel, Stutensee, DE;
Peter Krippner, Karlsruhe, DE;
Dieter Binz, Hirschberg, DE;
ABB Patent GmbH, Mannheim, DE;
Abstract
There is described a capacitive differential pressure sensor made using glass-silicon technology with a diaphragm plate of silicon, which is arranged between two carrier plates consisting of glass. The diaphragm plate has pressure-sensitively deflectable regions, which are respectively provided with a capacitor arrangement. The capacitor arrangement is connected to a measured-value processing device through connecting conductors. To improve the ratio of the measuring capacitances to the parasitic capacitances brought about by the connecting conductors, the diaphragm plate is outside the pressure-sensitively deflectable region the substrate of an electronic circuit which comprises at least one input stage of the measured-value processing device.