The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
Jun. 28, 2001
Fahrettin Levent Degertekin, Atlanta, GA (US);
Goksen G. Yaralioglu, Palo Alto, CA (US);
Butrus Thomas Khuri-Yakub, Palo Alto, CA (US);
The Board of Trustees of the Leland Stanford Junior University, Stanford, CA (US);
Abstract
An optical displacement sensor is provided for optically measuring the static and dynamic displacement of one or more reflectors that can be integrated in electronics and optics applications. The sensor includes an optically transparent substrate and a reflective grating deposited on the substrate. A light source provides optical illumination on the reflector through the substrate and the reflective grating. The reflector is positioned over the substrate and over the reflective grating. Furthermore, one or more photo-detectors are included to monitor reflected and diffracted light from the reflector and the reflective grating. The position of the reflector can be adjusted by applying at least one DC voltage. An AC signal could be added to at least one DC bias voltage for calibration of the sensor. The present invention also includes an array of reflectors as well as a transmission grating to deflect the optical illumination to the array of reflectors.