The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
Apr. 20, 2001
Richard Reim, Oviedo, FL (US);
Lockheed Martin Corporation, Bethesda, MD (US);
Abstract
The present invention is directed to an apparatus and method for examining small structures such as micro circuit structures. Exemplary embodiments can generate narrow electron beams for examining the micro circuits, and can eliminate the traversing of the x-rays through materials other than a target material and the sample structure. Exemplary embodiments eliminate having the x-rays traverse both a wafer and a plating target on the wafer being examined, by using a target material placed closer to the sample structure. Exemplary embodiments provide adequate magnification to perform fault analysis of small structures and provide an adequate contrast pattern for viewing images of the micro circuit being examined.