The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
Jun. 29, 2001
Applicant:
Inventors:
Stefan Eggers, Boizenburg, DE;
Hans-Dieter Straeter, Reppenstedt, DE;
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 2/600 ;
U.S. Cl.
CPC ...
G02B 2/600 ;
Abstract
An exposure device with a lamp, a condenser arrangement ( ), a light modulator, a field lens and a projection objective ( ), characterised in that the light modulator consists of a reflecting micro-mirror arrangement ( ) in front of which the field lens ( ) is arranged in a manner such that the beam path runs through the field lens ( ) onto the micro-mirror arrangement ( ) and after modulation and reflection at acute angles ( ) once again runs through the field lens ( ).