The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
Jun. 29, 2001
Satoshi Akimoto, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
In a step & scan projection exposure apparatus having a controller for setting for each step driving a step driving profile on the basis of a scan synchronization error, the step driving profile can be set by the exposure region layout, step direction, scan driving profile, and the like. Also, the step driving profile is determined by parameters such as the accelerations and speeds of reticle and wafer stages, the time taken until synchronous scan driving starts after step driving, and the time taken until exposure starts after the start of synchronous scan driving. A method of maintaining the apparatus by using a network, a semiconductor device manufacturing method, and a semiconductor manufacturing factory are also provided.