The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
Jun. 15, 2000
Applicant:
Inventor:
Gen Nakamura, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/168 ;
U.S. Cl.
CPC ...
H01L 2/168 ;
Abstract
A semiconductor manufacturing apparatus operable with supply of an electric power from a main electric power source wherein, in response to actuation of an emergency-off switch, the main electric power source is disconnected and, before the disconnection, braking control is made to a member being driven, by use of an electric power from the main electric power source.