The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
May. 09, 2002
Applicant:
Inventors:
Steven C. Deane, Redhill, GB;
Pieter J. Van der Zaag, Pyrford, GB;
Stephen J. Battersby, Haywards Heath, GB;
Assignee:
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/701 ; H01L 2/712 ; H01L 3/10392 ;
U.S. Cl.
CPC ...
H01L 2/701 ; H01L 2/712 ; H01L 3/10392 ;
Abstract
Short channel thin film transistors suffer from unacceptably high leakage currents. The invention provides an electronic device including a thin film transistor in which the length ( ) of the channel of the transistor is 1 &mgr;m or less, and the mobility of the semiconductor material in the channel is less than 0.2 cm /Vs. The selection of a low mobility semiconductor material results in acceptable off-current characteristics and its effect on the switching speed of the device is compensated for by the short channel length ( ) of the device.