The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
Jun. 20, 2001
NEC Corporation, Tokyo, JP;
Abstract
A micromachine includes a switch having a supporting member provided on a substrate. The supporting member is adjacent to a gap between a signal line and the substrate and has a predetermined height with respect to the substrate. A flexible beam member projects from the supporting member generally parallel to the substrate and extends so that part of the flexible member faces the gap. A contact electrode on the beam member faces the gap. A lower electrode on the substrate faces part of the beam member. Part of the beam member is conductive to function as an upper electrode. The thermal expansion coefficients of the beam member are almost symmetric in the thickness direction perpendicular to the substrate surface, at least from the portion at which the beam member is connected to the supporting member to the portion facing the lower electrode.