The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
Jun. 23, 1998
Thomas N. Jackson, State College, PA (US);
Daniel B. Thomasson, Santa Rosa, CA (US);
The Penn State Research Foundation, University Park, PA (US);
Abstract
The method of the invention configures a tri-layer thin film transistor (TFT) on a substrate, the TFT including a stack including a gate electrode supported by the substrate, followed by a first layer of insulator, a layer of semiconductor and a second layer of insulator. The method employs a first step of illumination through the substrate, as shadowed by said gate electrode, to enable a patterning of the second layer of insulator into an insulator patch which is aligned with the gate electrode. A next step of illumination through the substrate, as shadowed by said gate electrode, enables a patterning of metallization contacts for the TFT in alignment with the insulator patch.