The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2003
Filed:
Mar. 26, 2001
Toru Mikami, Fujisawa, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A mark position detecting system includes a light source for illuminating light on a mark for alignment measurement formed on a semiconductor substrate, a light detecting optical system and a measured light intensity profile preparing part, a theoretical light intensity profile preparing part, a light intensity profile comparison part. The measured light intensity profile preparation part prepares a measured light intensity profile denoting light intensity of reflected light from the mark from a detection result by the detecting optical system. The theoretical light intensity profile preparing part prepares a theoretical light intensity profile of the reflected light from a region of the mark where the intensity would change, using information on the shape and material of the mark. The light intensity profile comparison part compares the theoretical light intensity profile with the measured light intensity profile to detect the mark and misalignment.