The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2003
Filed:
Jul. 10, 2001
Norio Suzuki, Mito, JP;
Hiroyuki Ichizoe, Mizuho, JP;
Masayuki Kojima, Kokubunji, JP;
Keiji Okamoto, Higashiyamato, JP;
Shinichi Horibe, Hachiouji, JP;
Kozo Watanabe, Kokubunji, JP;
Yasuko Yoshida, Sayama, JP;
Shuji Ikeda, Koganei, JP;
Akira Takamatsu, Hamura, JP;
Norio Ishitsuka, Chiyoda, JP;
Atsushi Ogishima, Tachikawa, JP;
Maki Shimoda, Hachiouji, JP;
Other;
Abstract
Grooves are defined in a substrate having device isolation regions by dry etching using silicon nitride films and side wall spacers as masks. Thereafter, the side wall spacers lying on side walls of the silicon nitride films are removed and the substrate is subjected to thermal oxidation, whereby the surface of the substrate at a peripheral portion of each active region is subjected to so-called round processing so as to have a sectional shape having a convex rounded shape.