The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2003
Filed:
Jul. 07, 2000
Cozy Ban, Tokyo, JP;
Kazunori Koba, Osaka, JP;
Shoichi Momose, Osaka, JP;
Toshinori Iwai, Osaka, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A high-temperature ultrapure water production apparatus comprises an evaporator for treating pretreated water obtained by a pretreating system or primary pure water obtained by a primary pure water system to prepare ultrapure water having a high temperature, an ion exchanger for removing trace metal ions from the ultrapure water obtained by the evaporator a product water heat exchanger made of titanium for subjecting to heat exchange the high-temperature ultrapure water obtained by the evaporator and containing the trace metal ions unremoved therefrom and the ultrapure water having ordinary temperature and having its trace metal ions removed by treatment by the ion exchanger a cooling heat exchanger made of SUS for cooling to not higher than 40° C. the ultrapure water containing the unremoved trace metal ions and cooled by the product water heat exchanger for use as feed water for the ion exchanger