The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2003
Filed:
Sep. 21, 2000
Todd K. Makishi, Harbor City, CA (US);
Northrop Grumman Corporation, Redondo Beach, CA (US);
Abstract
Cleaning of MBE vacuum chambers of residue containing a volatile material, such as red phosphorus, is safely achieved by wetting the residue with de-ionized water ( ) and depositing the residue in a water bath, formed by the water at the bottom of the chamber, to form a slurry. The slurry is vacuumed ( & ) from the chamber and collected ( ) within the canister ( ) of the vacuum cleaner. The water precludes ignition of the red phosphorus during cleaning of the chamber and during collection within the canister of the vacuum cleaner.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile