The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2003
Filed:
Jan. 04, 2001
Toshiyuki Takamatsu, Yachiyo-shi, Chiba, 276-0049, JP;
Other;
Abstract
A discharge tube ( ) provided inside the cavity of a waveguide ( ) is so structured as to monotonously decrease the cross section of the cavity in the direction in which the microwave travels and thereby to close the cavity. The waveguide ( ) has vent holes ( , 34 ) made through the tube wall. A metallic member ( ) monotonously decreasing the cross section of the cavity in the direction in which the microwave travels and thereby closing the cavity is provided on the opposite side to the discharge tube ( ) in the direction in which the microwave travels. A fluid is made to flow through the metallic member. A gas introducing port is provided in the discharge tube ( ), and a gas exhaust port is provided also in the discharge tube ( ) on the opposite side to the gas introducing port with respect to the center axis of the waveguide ( ). Thus, no standing wave is generated from the time when a plasma is created, the plasma absorbs energy at high efficiency, the temperature at the wall of the discharge area little increases, and the density of active particles is high.