The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2003
Filed:
Jan. 19, 2001
Kenichi Kurosawa, Matsudo, JP;
SMC Kabushiki Kaisha, Tokyo, JP;
Abstract
A flow controller for controlling a flow rate of a fluid flowing through a fluid passage comprises a control valve for which a degree of opening of a valve is adjusted by a control signal, an orifice arranged on an outflow side of the control valve, a combined sensor arranged on an inflow side of the orifice for almost simultaneously detecting a pressure and a temperature of the fluid, and a control circuit. The combined sensor includes a pressure-detecting element for deriving a detection signal corresponding to the pressure of the fluid, and a temperature-detecting element for deriving a detection signal corresponding to the temperature of the fluid. The pressure-detecting element and the temperature-detecting element are arranged closely to one another on an identical surface of a pressure-receiving section.